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The Candela series of Optical Surface Analyzers (OSA) from KLA-Tencor (http://) automatically detect and classify surface defects on optoelectronic and semiconductor wafers, even transparent wafers such as sapphire and glass.
The OSA systems combine four technologies to the simultaneous measure reflectivity and topographic variations on the surface, enabling detection of particles, stains, scratches, pits and bumps. The OSA images can be used for visual inspection or to automatically generate defect maps and reports.
Epi layers and film coatings can also be inspected for uniformity, particles, and surface defects. Our newest system, with proprietary X-Beam technology, utilizes two orthogonal laser paths - radial and circumferential - and provides the same suite of four OSA detection channels. The addition of the radial laser path enables detection of circumferential micro-scratches, might might otherwise be missed because of their orientation.
KLA-Tencors systems for unpatterned wafer inspection are available with manual or cassette-to-cassette handling, and offer particle sensitivity down to < 0.08 micron.
For details, click http://?name=bysol_defect_transparent
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